Design and Simulation of MEMS Capacitive Pressure Sensor Array for Wide Range Pressure Measurement
نویسندگان
چکیده
منابع مشابه
New Design of Mems piezoresistive pressure sensor
The electromechanical analysis of a piezoresistive pressure microsensor with a square-shaped diaphragm for low-pressure biomedical applications is presented. This analysis is developed through a novel model and a finite element method (FEM) model. A microsensor with a diaphragm 1000 „m length and with thickness=400 µm is studied. The electric response of this microsensor is obtained with applyi...
متن کاملDesign and Simulation of piezorestive pressure sensor for AFM Probe the displacement measurement
investigating pressure applied in surface vertically that is done by use of mechanical procedures isn’t efficient to measure pressure applied in inner surface of reservoir or pipes having gas due to entering pressure into whole walls and different surfaces. So, in order to measure this kind of pressure, several studies were conducted in past decades and also various procedures were proposed tha...
متن کاملA Study of Silicon based MEMS Capacitive Sensor for Absolute Pressure Measurement of a Specific Range
In this paper two MEMS capacitive pressure sensor of two diffident geometries are designed for measurement of absolute pressure. Both of these sensors are designed as parallel plates where one is movable and the other is fixed. The only difference with common parallel plate structure is that one of the movable plates is supported by four anchors with respect to the fixed plate. Here we have con...
متن کاملModeling of capacitance and sensitivity of a MEMS pressure sensor
In this paper modeling of capacitance and sensitivity for MEMS capacitive pressure sensor is presented. In capacitive sensor the sensitivity is proportional to deflection and capacitance changes versus pressure. Therefore first the diaphragm displacement, capacitance and sensitivity of sensor with square diaphragm have been modeled and then simulated using finite element method (FEM). It can b...
متن کاملDifferential Wide Temperature Range CMOS Interface Circuit for Capacitive MEMS Pressure Sensors
We describe a Complementary Metal-Oxide Semiconductor (CMOS) differential interface circuit for capacitive Micro-Electro-Mechanical Systems (MEMS) pressure sensors that is functional over a wide temperature range between -55 °C and 225 °C. The circuit is implemented using IBM 0.13 μm CMOS technology with 2.5 V power supply. A constant-gm biasing technique is used to mitigate performance degrada...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: International Journal of Computer Applications
سال: 2017
ISSN: 0975-8887
DOI: 10.5120/ijca2017913554